Nano- And Microelectromechanical Systems

NANO- AND MICROELECTROMECHANICAL SYSTEMS Fundamentals of Nano- and Microengineering © 2001 by CRC Press LLC A book in the Nano- and Microscience, Engineering, Technology and Medicine Series NANO- AND MICROELECTROMECHANICAL SYSTEMS Fundamentals of Nano- and Microengineering Sergey Edward Lyshevski Boca Raton CRC Press London New York Washington, D.C. Library of Congress Cataloging-in-Publication Data Lyshevski, Sergey Edward. Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski. p. cm. -- (Nano- and microscience, engineering, technology, and medicine series) Includes index. Includes bibliographical references and index. ISBN 0-8493-916-6 (alk. paper) 1. Microelectromechanical systems. 1. Title. II. Series. TK7875 .L96 2000 621.381—dc201 00-057953 CIP This book contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with permission, and sources are indicated. A wide variety of references are listed. Reasonable efforts have been made to publish reliable data and information, but the author and the publisher cannot assume responsibility for the validity of all materials or for the consequences of their use. Neither this book nor any part may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying, microfilming, and recording, or by any information storage or retrieval system, without prior permission in writing from the publisher. The consent of CRC Press LLC does not extend to copying for general distribution, for promotion, for creating new works, or for resale. Specific permission must be obtained in writing from CRC Press LLC for such copying. Direct all inquiries to CRC Press LLC, 2000 N.W. Corporate Blvd., Boca Raton, Florida 33431. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation, without intent to infringe. © 2001 by CRC Press LLC No claim to original U.S. Government works International Standard Book Number 0-8493-916-6 Library of Congress Card Number 00-057953 Printed in the United States of America 1 2 3 4 5 6 7 8 9 0 Printed on acid-free paper To my family © 2001 by CRC Press LLC PREFACE This book is designed for a one-semester course on Nano- and Microelectromechanical Systems or Nano- and Microengineering. A typical background needed includes calculus, electromagnetics, and physics. The purpose of this book is to bring together in one place the various methods, techniques, and technologies that students and engineers need in solving a wide array of engineering problems in formulation, modeling, analysis, design, and optimization of high-performance microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). This book is not intended to cover fabrication aspects and technologies because a great number of books are available. At the same time, extremely important issues in analysis, design, modeling, optimization, and simulation of NEMS and MEMS have not been comprehensively covered in the existing literature. Twenty first century nano- and microtechnology revolution will lead to fundamental breakthroughs in the way materials, devices, and systems are understood, designed, function, manufactured, and used. Nanoengineering and nanotechnology will change the nature of the majority of the humanmade structures, devices, and systems. Current technological needs and trends include technology development and transfer, manufacturing and deployment, implementation and testing, modeling and characterization, design and optimization, simulation and analysis of complex nano- and microscale devices (for example, molecular computers, logic gates and switches, actuators