Mass Transfer Of Elements In The Undersurface Layers Under Combined Treatment By Pulsed Ion Beams And Plasma Flows
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KORUS, 2001. Physics P. 363-366. The investigations results are presented for some processes occuring at different stages of strong adhesion coatings and modified layers creation with the use of high-dose impantation and deep diffusive doping of elements under pulsed energetic impact. The investigations have been carried out on the installation providing the possibility of combined materials treatment with pulsed ion beams of power density ranged from 10(3) to 10(8) W/cm2 . The facility includes the accelerator of high-power ion beams and the sources of repetitively-pulsed metal ion beams and metal plasma flows.
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