Ion Implantation and Synthesis of Materials
M. Nastasi
J.W. Mayer
Ion Implantation and Synthesis of Materials With 131 Figures and 10 Tables
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Michael Nastasi, PhD Laboratory Fellow and Team Leader Ion-Solid Interaction and Interface Engineering Team Los Alamos National Laboratory, MS-K771 Los Alamos NM 87545, USA E-mail:
[email protected]
James W. Mayer, PhD Center for Solid State Science Arizona State University Tempe, AZ, 85287-1704, USA E-mail:
[email protected]
Library of Congress Control Number: 2006930120
ISBN-10 3-540-23674-0 Springer Berlin Heidelberg New York ISBN-13 978-3-540-23674-0 Springer Berlin Heidelberg New York This work is subject to copyright. All rights are reserved, whe