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Silicon has been and will most probably continue to be the dominant material in semiconductor technology. Although the defect-free silicon single crystal is one of the best understood systems in materails science, its electrochemistry to many people is still a kind of "alchemy". This view is partly due to the interdisciplinary aspects of the topic: Physics meets chemistry at the silicon-electrolyte interface.This book gives a comprehensive overview of this important aspect of silicon technology as well as examples of applications ranging from photonic crystals to biochips. It will serve materials scientists as well as engineers involved in silicon technology as a quick reference with its more than 150 technical tables and diagrams and ca. 1000 references cited for easy access of the original literature.
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Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications. Volker Lehmann Copyright © 2002 Wiley-VCH Verlag GmbH ISBNs: 3-527-29321-3 (Hardcover); 3-527-60027-2 (Electronic)
Volker Lehmann Electrochemistry of Silicon
Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications. Volker Lehmann Copyright © 2002 Wiley-VCH Verlag GmbH ISBNs: 3-527-29321-3 (Hardcover); 3-527-60027-2 (Electronic)
Cover illustrations Upper left: Electrolytic double cell for diffusion length mapping of 200 mm silicon wafers using the ELYMAT technique, as discussed in Section 10.3. After [21]. Upper right: Electroluminescence from a micro PS film anodized in an O-ring cell viewed from the top (10% acetic acid, 10 mA cm–2, 2.6 cm2 active area). Note that the luminescence appears orange in the center line, where the film has been formed under high current density (in 1:1 ethanoic HF at 200 mA cm–2), while it appears red for low formation current density (10 mA cm–2). After [Le3]. Lower left: Free-standing porous sili