Dry Etching For Vlsi

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E-Book Overview

This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing.

E-Book Information

  • Year: 1,991

  • Edition: 1

  • Pages: 260

  • Pages In File: 260

  • Language: English

  • Topic: 230

  • Issue: до 2011-08

  • Identifier: 0306438356,9780306438356

  • Ddc: 621.381/52

  • Lcc: TK7871.85 .R58 1991

  • Org File Size: 34,284,759

  • Extension: pdf

  • Tags: Приборостроение Полупроводниковые приборы

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