Dry Etching For Vlsi

Preparing link to download Please wait... Download

E-Book Overview

This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing.

E-Book Information

  • Year: 1,991

  • Edition: 1

  • Pages: 260

  • Pages In File: 260

  • Language: English

  • Topic: 230

  • Issue: до 2011-08

  • Identifier: 0306438356,9780306438356

  • Ddc: 621.381/52

  • Lcc: TK7871.85 .R58 1991

  • Org File Size: 34,284,759

  • Extension: pdf

  • Tags: Приборостроение Полупроводниковые приборы

You might also like

книга кинжалов 142    0

пищевой террор. есть или жить? продукты массового уничтожения. 147    0

современные системы отопления. 57    0

старинная русская почта 215    0

большая энциклопедия электрика 57    0

Radio Frequency Identification: Security And Privacy Issues: 6th International Workshop, Rfidsec 2010, Istanbul, Turkey, June 8-9, 2010, Revised Selected Papers 61    0

History Of Rotating Machinery Dynamics 53    0

Typography: Design And Practice 50    0

Modeling And Control Of Fuel Cells: Distributed Generation Applications (ieee Press Series On Power Engineering) 61    0

The Workbench Book: A Craftsman's Guide To Workbenches For Every Type Of Woodworking (craftsman's Guide To) 43    0