Physics Of Thin Films. Vol.14. Contemporary Preparative Techniques

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Academic Press, Boston, 1989, 260 c. В книге представлены такие большие главы: 1) Реактивное распыление 2) Плазменное окисление 3) Катодное дуговое плазменное осаждение тонких пленок 4) Подготовка подложек для осаждения пленок с использованием методик тлеющего разряда

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  • Pages In File: 268

  • Language: English

  • Topic: 285

  • Library: twirpx

  • Commentary: 415,476

  • Org File Size: 17,270,333

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  • Tags: Физика Физика плазмы

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