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Sellier Druck GmbH, Freising, Germany, 2011. - 71 p. ISBN 978-3-86236-013-0
This book was produced with the technical cooperation of Sulzer Metaplas GmbH. Translation: Malcolm Eley, Duisburg. First published in Germany in the series "Die Bibliothek der Technik". Original title: "Plasmagestutzte Oberflachenbeschichtung", Suddeutscher Verlag onpact GmbH, 2010.<strong>ContentsIntroductionPlasma-assisted coating processes PVD processes CVD processes Hybrid processes Combination processesMachine technology Machine technology requirements Standard machines Specialized machines Turnkey solutionsProcess technology for high-performance layers 40 High-performance PVD and DLC coatings Pre-treatment Post-treatmentApplication Tools Precision componentsOutlookGlossaryThe company behind this book
E-Book Content
VERLAG MODERNE INDUSTRIE
Plasma-Assisted Surface Coating Processes, methods, systems and applications
Sulzer Metco
verlag moderne industrie
Plasma-Assisted Surface Coating Processes, methods, systems and applications
Georg Erkens, Jörg Vetter, Jürgen Müller, Thomas auf dem Brinke, Martin Fromme, Alexander Mohnfeld
This book was produced with the technical cooperation of Sulzer Metaplas GmbH.
Contents Introduction
4
Plasma-assisted coating processes
6
PVD processes ........................................................................................
7
CVD processes ........................................................................................
19
Hybrid processes .....................................................................................
22
Combination processes ...........................................................................
24
Machine technology
32
Machine technology requirements ..........................................................
32
Standard machines ..................................................................................
34
Specialized machines ..............................................................................
36
Turnkey solutions ....................................................................................
39
Process technology for high-performance layers
40
High-performance PVD and DLC coatings ............................................
41
© 2011 All rights reserved with Süddeutscher Verlag onpact GmbH, 81677 Munich www.sv-onpact.de
Pre-treatment ...........................................................................................
47
Post-treatment .........................................................................................
50
First published in Germany in the series Die Bibliothek der Technik Original title: Plasmagestützte Oberflächenbeschichtung © 2010 by Süddeutscher Verlag onpact GmbH
Application
52
Tools ........................................................................................................
52
Precision components .............................................................................
60
Outlook
66
Glossary
69
The company behind this book
71
Translation: Malcolm Eley, Duisburg
Illustrations: No. 32 ARKU Maschinenbau GmbH, Baden-Baden; No. 38 JEC E