E-Book Overview
Sellier Druck GmbH, Freising, Germany, 2011. - 71 p.ISBN 978-3-86236-013-0
This book was produced with the technical cooperation of Sulzer Metaplas GmbH. Translation: Malcolm Eley, Duisburg.First published in Germany in the series "Die Bibliothek der Technik". Original title: "Plasmagestutzte Oberflachenbeschichtung", Suddeutscher Verlag onpact GmbH, 2010.<strong>ContentsIntroductionPlasma-assisted coating processes PVD processesCVD processesHybrid processesCombination processesMachine technology Machine technology requirements Standard machines Specialized machinesTurnkey solutionsProcess technology for high-performance layers 40High-performance PVD and DLC coatingsPre-treatment Post-treatmentApplicationTools Precision componentsOutlookGlossaryThe company behind this book
E-Book Content
VERLAG MODERNE INDUSTRIE Plasma-Assisted Surface Coating Processes, methods, systems and applications Sulzer Metco verlag moderne industrie Plasma-Assisted Surface Coating Processes, methods, systems and applications Georg Erkens, Jörg Vetter, Jürgen Müller, Thomas auf dem Brinke, Martin Fromme, Alexander Mohnfeld This book was produced with the technical cooperation of Sulzer Metaplas GmbH. Contents Introduction 4 Plasma-assisted coating processes 6 PVD processes ........................................................................................ 7 CVD processes ........................................................................................ 19 Hybrid processes ..................................................................................... 22 Combination processes ........................................................................... 24 Machine technology 32 Machine technology requirements .......................................................... 32 Standard machines .................................................................................. 34 Specialized machines .............................................................................. 36 Turnkey solutions .................................................................................... 39 Process technology for high-performance layers 40 High-performance PVD and DLC coatings ............................................ 41 © 2011 All rights reserved with Süddeutscher Verlag onpact GmbH, 81677 Munich www.sv-onpact.de Pre-treatment ........................................................................................... 47 Post-treatment ......................................................................................... 50 First published in Germany in the series Die Bibliothek der Technik Original title: Plasmagestützte Oberflächenbeschichtung © 2010 by Süddeutscher Verlag onpact GmbH Application 52 Tools ........................................................................................................ 52 Precision components ............................................................................. 60 Outlook 66 Glossary 69 The company behind this book 71 Translation: Malcolm Eley, Duisburg Illustrations: No. 32 ARKU Maschinenbau GmbH, Baden-Baden; No. 38 JEC E