E-Book Overview
This proceedings volume archives the contributions of the speakers who attended the NATO Advanced Research Workshop on “Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment” held at the Sanatorium Puscha Ozerna, th th Kyiv, Ukraine, from 25 to 29 April 2004. The semiconductor industry has maintained a very rapid growth during the last three decades through impressive technological achievements which have resulted in products with higher performance and lower cost per function. After many years of development semiconductor-on-insulator materials have entered volume production and will increasingly be used by the manufacturing industry. The wider use of semiconductor (especially silicon) on insulator materials will not only enable the benefits of these materials to be further demonstrated but, also, will drive down the cost of substrates which, in turn, will stimulate the development of other novel devices and applications. In itself this trend will encourage the promotion of the skills and ideas generated by researchers in the Former Soviet Union and Eastern Europe and their incorporation in future collaborations.
E-Book Content
Science and Technology of Semiconductor-OnInsulator Structures and Devices Operating in a Harsh Environment
NATO Science Series A Series presenting the results of scientific meetings supported under the NATO Science Programme. The Series is published by IOS Press, Amsterdam, and Kluwer Academic Publishers in conjunction with the NATO Scientific Affairs Division Sub-Series I. II. III. IV. V.
Life and Behavioural Sciences Mathematics, Physics and Chemistry Computer and Systems Science Earth and Environmental Sciences Science and Technology Policy
IOS Press Kluwer Academic Publishers IOS Press Kluwer Academic Publishers IOS Press
The NATO Science Series continues the series of books published formerly as the NATO ASI Series. The NATO Science Programme offers support for collaboration in civil science between scientists of countries of the Euro-Atlantic Partnership Council. The types of scientific meeting generally supported are “Advanced Study Institutes” and “Advanced Research Workshops”, although other types of meeting are supported from time to time. The NATO Science Series collects together the results of these meetings. The meetings are co-organized bij scientists from NATO countries and scientists from NATO’s Partner countries – countries of the CIS and Central and Eastern Europe. Advanced Study Institutes are high-level tutorial courses offering in-depth study of latest advances in a field. Advanced Research Workshops are expert meetings aimed at critical assessment of a field, and identification of directions for future action. As a consequence of the restructuring of the NATO Science Programme in 1999, the NATO Science Series has been re-organised and there are currently Five Sub-series as noted above. Please consult the following web sites for information on previous volumes published in the Series, as well as details of earlier Sub-series. http://www.nato.int/science http://www.wkap.nl http://www.iospress.nl http://www.wtv-books.de/nato-pco.htm
Series II: Mathematics, Physics and Chemistry – Vol. 185
Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment edited by
Denis Flandre Université Catholique de Louvain, Microelectronics Laboratory, Louvain-la-Neuve, Belgium
Alexei N. Nazarov National Academy of Science of Ukraine, Institute of Semiconductor Physics, Kyiv, Ukraine and
Peter L.F. Hemment University of Surrey, School of Electronics and Physical Sciences, Guildford, U.K.
Kluwer Academic Publishers Dordrecht / Boston / London Published in cooperation with NATO Scientific Affairs Division
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