E-Book Overview
Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps. In this topical volume, authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products. The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass. The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.
E-Book Content
Advanced Micro & Nanosystems Volume 5 Micro Process Engineering
Advanced Micro and Nanosystems Vol. 5. Micro Process Engineering. Edited by N. Kockmann Copyright © 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim ISBN: 3-527-31246-3
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Advanced Micro & Nanosystems Volume 5 Micro Process Engineering Fundamentals, Devices, Fabrication, and Applications
Volume Editor Norbert Kockmann
Volume Editor Dr.-Ing. Norbert Kockmann Laboratory for Design of Microsystems University of Freiburg – IMTEK Georges-Köhler-Allee 102 79110 Freiburg Germany Series Editors
n All books published by Wiley-VCH are carefully produced. Nevertheless, authors, editors, and publisher do not warrant the information contained in these books, including this book, to be free of errors. Readers are advised to keep in mind that statements, data, illustrations, procedural details or other items may i