E-Book Overview
This book provides comprehensive coverage of stress, defect formation and surface evolution in thin films. With its balanced coverage of theory, experiment and simulation and many homework problems, the text will be essential reading in senior undergraduate and graduate courses on thin films.
E-Book Content
Thin Film Materials Stress, Defect Formation and Surface Evolution
L. B. Freund Division of Engineering Brown University
S. Suresh Department of Materials Science and Engineering Massachusetts Institute of Technology
iii (January 12, 2003)
Contents
page xiii xv
Preface 1 1.1 1.2
1.3
1.4
1.5
1.6
Introduction and Overview A classi¯cation of thin ¯lm con¯gurations Film deposition methods 1.2.1 Physical vapor deposition 1.2.2 Chemical vapor deposition 1.2.3 Thermal spray deposition 1.2.4 Example: Thermal barrier coatings Modes of ¯lm growth by vapor deposition 1.3.1 From vapor to adatoms 1.3.2 From adatoms to ¯lm growth 1.3.3 Energy density of a free surface or an interface 1.3.4 Surface stress 1.3.5 Growth modes based on surface energies Film microstructures 1.4.1 Epitaxial ¯lms 1.4.2 Example: Vertical-cavity surface-emitting lasers 1.4.3 Polycrystalline ¯lms 1.4.4 Example: Films for magnetic storage media Processing of microelectronic structures 1.5.1 Lithography 1.5.2 The damascene process for copper interconnects Processing of MEMS structures 1.6.1 Bulk micromachining 1.6.2 Surface micromachining 1.6.3 Molding processes iv
1 3 6 7 10 12 14 17 17 19 22 27 30 33 34 43 44 50 52 53 54 57 57 59 60
Contents
1.6.4 NEMS structures 1.6.5 Example: Vibrating beam bacterium detector 1.7 Origins of ¯lm stress 1.7.1 Classi¯cation of ¯lm stress 1.7.2 Stress in epitaxial ¯lms 1.8 Growth stress in polycrystalline ¯lms 1.8.1 Compressive stress prior to island coale