Plasma Processing For Vlsi

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E-Book Information

  • Series: VLSI Electronics Microstructure Science 8

  • Year: 1,984

  • Edition: 1st

  • City: New York

  • Pages: xiv, 527 pages : ill ; 24 cm

  • Pages In File: 523

  • Language: English

  • Topic: 285

  • Identifier: 0-12-234108-2,978-0-12-234108-3

  • Issn: 0736-7031

  • Org File Size: 63,303,072

  • Extension: pdf

  • Tags: Физика Физика плазмы

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