Nano-tribology And Materials In Mems

Sujeet K. Sinha N. Satyanarayana Seh Chun Lim Editors Nano-tribology and Materials in MEMS Nano-tribology and Materials in MEMS Sujeet K. Sinha N. Satyanarayana Seh Chun Lim • Editors Nano-tribology and Materials in MEMS 123 Editors Sujeet K. Sinha Department of Mechanical Engineering Indian Institute of Technology Kanpur India ISBN 978-3-642-36934-6 DOI 10.1007/978-3-642-36935-3 N. Satyanarayana Seh Chun Lim Department of Mechanical Engineering National University of Singapore Singapore ISBN 978-3-642-36935-3 (eBook) Springer Heidelberg New York Dordrecht London Library of Congress Control Number: 2013934533 Ó Springer-Verlag Berlin Heidelberg 2013 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. Exempted from this legal reservation are brief excerpts in connection with reviews or scholarly analysis or material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of the work. Duplication of this publication or parts thereof is permitted only under the provisions of the Copyright Law of the Publisher’s location, in its current version, and permission for use must always be obtained from Springer. Permissions for use may be obtained through RightsLink at the Copyright Clearance Center. Violations are liable to prosecution under the respective Copyright Law. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. While the advice and information in this book are believed to be true and accurate at the date of publication, neither the authors nor the editors nor the publisher can accept any legal responsibility for any errors or omissions that may be made. The publisher makes no warranty, express or implied, with respect to the material contained herein. Printed on acid-free paper Springer is part of Springer Science?Business Media (www.springer.com) Preface The field of nanotribology has advanced to a great extent thanks to the phenomenal growth of information storage industry. The magnetic hard disks used for recording and retrieving digital data require extremely thin nanolubricant for the protection of the disk from mechanical damages and wear by the slider which flies just above the surface of the disk with flying height only a few nanometer. Even though the slider is designed not to touch the disk, contacts between the slider and the disk are inevitable and hence we require the protection of the disk by the nanolubricant. A similar requirement, at least in length scale, is experienced in microsystems such as micro-ele