E-Book Overview
Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.Contents - Foreword - Preface - List of Symbols - Basic Electromagnetism - Elements of Geometrical Optics - Elements of Diffraction Theory - Imaging of Extended Objects with Finite Sources - Resolution and Image Enhancement - Oblique Rays - Aberrations - Numerical Computation - Variabilities - Appendix A: Birefringence - Appendix B: Stationarity and Ergodicity - Appendix C: Some Zernike Polynomials - Appendix D: Simulator Accuracy Tests - Appendix E: Select Refractive Indexes - Appendix F: Assorted Theorems and Identities - Bibliography - Solutions to Exercises - Index
E-Book Content
Optical Imaging in Projection Microlithography
Downloaded from SPIE Digital Library on 25 Feb 2010 to 130.60.68.45. Terms of Use: http://spiedl.org/terms
Tutorial Texts Series • Optical Imaging in Projection Microlithograpy, Alfred Kwok-Kit Wong, TT66 • Metrics for High-Quality Specular Surfaces, Lionel R. Baker, TT65 • Field Mathematics for Electromagnetics, Photonics, and Materials Science, Bernard Maxum, TT64 • High-Fidelity Medical Imaging Displays, Aldo Badano, Michael J. Flynn, and Jerzy Kanicki, TT63 • Diffractive Optics—Design, Fabrication, and Test, Donald C. O'Shea, Thomas J. Suleski, Alan D. Kathman, and Dennis W. Prather, TT62 • Fourier-Transform Spectroscopy Instrumentation Engineering, Vidi Saptari, TT61 • The Power- and Energy-Handling Capability of Optical Materials, Components, and Systems, Roger M. Wood, TT60 • Hands-on Morphological Image Processing, Edward R. Dougherty, Roberto A. Lotufo, TT59 • Integrated Optomechanical Analysis, Keith B. Doyle, Victor L. Genberg, Gregory J. Michels, Vol. TT58 • Thin-Film Design: Modulated Thickness and Other Stopband Design Methods, Bruce Perilloux, Vol. TT57 • Optische Grundlagen für Infrarotsysteme, Max J. Riedl, Vol. TT56 • An Engineering Introduction to Biotechnology, J. Patrick Fitch, Vol. TT55 • Image Performance in CRT Displays, Kenneth Compton, Vol. TT54 • Introduction to Laser Diode-Pumped Solid State Lasers, Richard Scheps, Vol. TT53 • Modulation Transfer Function in Optical and Electra-Optical Systems, Glenn D. Boreman, Vol. TT52 • Uncooled Thermal Imaging Arrays, Systems, and Applications, Paul W. Kruse, Vol. TT51 • Fundamentals of Antennas, Christos G. Christodoulou and Parveen Wahid, Vol. TT50 • Basics of Spectroscopy, David W. Ball, Vol. TT49 • Optical Design Fundamentals Jor infrared Systems, Second Edition, Max J. Riedl, Vol. TT48 • Resolution Enhancement Techniques in Optical Lithography, Alfred Kwok-Kit Wong, Vol. TT47 • Copper Interconnect Technology, Christoph Steinbriichel and Barry L. Chin, Vol. TT46 • Optical Design for Visual Systems, Bruce H. Walker, Vol. TT45 • Fundamentals of Contamination Control, Alan C. Tribble, Vol. TT44 • Evolutionary Computation: Principles and Practice for Signal Processing, David Fogel, Vol. TT43 • Infrared Optics and Zoom Lenses, Allen Mann, Vol. TT42 • Introduction to Adaptive Optics, Robert K. Tyson, Vol. TT41 • Fractal and Wavelet Image Compression Techniques, Stephen Welstead, Vol. TT40 • Analysis of Sampled Imaging Systems, R. H. Vollmerhausen and R. G. Driggers, Vol. TT39 • Tissue Optics: Light Scattering Methods and Instruments fo