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This book contains a selection of papers presented at the 12th Italian Conference on Sensors and Microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. The scientific values of the papers also offers an invaluable source to analysts intending to survey the Italian situation about sensors and microsystems. In an interdisciplinary approach, many aspects of the disciplines are covered, ranging from materials science, chemistry, applied physics, electronic engineering and biotechnologies.
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Proceedings of the 12th Italian Conference Sensors and Microsystems This page intentionally left blank 12th Italian ConferencSi|i|K::;::;:; SensorsandMicrosystems Napoli, Italy 12 - 14 February 2007 Editors G Di Francia ENEA CR Portici, Italy P Maddalena University of Napoli Federico II, Italy I Rendina CNR-IMM, Italy C Di Natale University of Rome "TorVergata'; Italy A D'Amico University of Rome "TorVergata" Italy World Scientific NEW J E R S E Y • L O N D O N • S I N G A P O R E • B E I J I N G • S H A N G H A I • H O N G K O N G • T A I P E I • C H E N N A I Published by World Scientific Publishing Co. Re. Ltd. 5 Toh Tuck Link, Singapore 596224 USA ofice: 27 Warren Street, Suite 401-402, Hackensack, NJ 07601 UK once: 57 Shelton Street, Covent Garden, London WC2H 9HE British Library Cataloguing-in-PublicationData A catalogue record for this book is available from the British Library. SENSORS AND MICROSYSTEMS Proceedings of the 12th Italian Conference Copyright Q 2008 by World Scientific Publishing Co. Pte. Ltd. All rights reserved. This book, or parts thereoj may not be reproduced in any form or by any means, electronic or mechanical, including photocopying, recording or any information storage and retrieval system now known or to be invented, without written permission from the Publisher. For photocopying of material in this volume, please pay a copying fee through the Copyright Clearance Center, Inc., 222 Rosewood Drive, Danvers, MA 01923, USA. In this case permission to photocopy is not required from the publisher. ISBN-13 978-981-283-358-7 ISBN-10 981-283-358-7 Printed in Singapore by World Scientific Printers FOREWORD The present volume contains the proceedings of the 12* Italian Conference on Sensors and Microsystems, organized by AISEM (Associazione Italiana Sensori e Microsistemi) and held in the town of Napoli on February 12-14 2007. This 12th edition has been hosted in the Federico I1 University Congress Centre, just in front of the Megaride islet, where in the 8th century B.C., almost 3000 years ago, Neapolis (or Partenope) was founded by the Greeks, and where an impressive castle built by the Normans in the 12th century, named Caste1 dell’Ovo, continues to dominate the Gulf, defying time. ENEA, Ente per le Nuove Tecnologie, 1’Energia e l’Ambiente, Universiti di Napoli “Federico 11” and CNR, Consiglio Nazionale delle Ricerche, have been the organizers of this scientific event. The Conference has gathered the continuously increasing italian community working on sensors and microsystems. The present proceedings contains about 80 of the regular contributions that at the Conference were organized in 9 sessions: Chemical sensors, Physical Sensors, Microsystems, Biosensors, Optical Sensors and Microsystems, Device Fabrication and Assembly, Nanosensors, Array processing and networks. During this Conference edition, for the first time in Italy, a showroom could be organized where practically all the electronic noses and tongues produced or investigated in Italy have been presented. Many thanks are due to the several groups that have contributed towards the success of this event. D