E-Book Overview
This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field.Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added.
E-Book Content
The Materials Science of Thin Films I I I The Materials Science of Milton Ohring Stevens Institute of Technology Department of Materials Science and Engineering Hoboken, New Jersey Academic Press San Diego New York Boston London Sydney Tokyo Toronto This book is printed on acid-free paper. @ Copyright 0 1992 by Academic Pres All rights reserved. No pari of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording. or any information storage and retrieval system, without permission in writing from the publisher. Designed by Elizabeth E. Tustian ACADEMIC PRESS A Division of Harcouri Brace d; Company 525 B Street, Suite 1900. San Diego, California 92101-4495 United Kingdom U i t i o n published by ACADEMIC PRESS LIMITED 24-28 Oval R o d . London NWI 7DX Library of Congress Cataloging-in-Publication Data Ohring. Milton, date. The materials science of thin films / Milton Oh