Ion Implantation and Synthesis of Materials M. Nastasi J.W. Mayer Ion Implantation and Synthesis of Materials With 131 Figures and 10 Tables 123 Michael Nastasi, PhD Laboratory Fellow and Team Leader Ion-Solid Interaction and Interface Engineering Team Los Alamos National Laboratory, MS-K771 Los Alamos NM 87545, USA E-mail:
[email protected] James W. Mayer, PhD Center for Solid State Science Arizona State University Tempe, AZ, 85287-1704, USA E-mail:
[email protected] Library of Congress Control Number: 2006930120 ISBN-10 3-540-23674-0 Springer Berlin Heidelberg New York ISBN-13 978-3-540-23674-0 Springer Berlin Heidelberg New York This work is subject to copyright. All rights are reserved, whe