Rough Surfaces

Rough Surfaces Second Edition Rough Surfaces Second Edition Tom R.Thomas Production Engineering Department, Chalmers University of Technology, Sweden Imperial College Press Published by Imperial College Press 203 Electrical Engineering Building Imperial College London SW7 2BT Distributed by World Scientific Publishing Co. Re. Ltd. P 0 Box 128, Farrer Road, Singapore 912805 USA office: Suite lB, 1060 Main Street, River Edge, NJ 07661 U K ofice: 57 Shelton Street, Covent Garden, London WC2H 9HE British Library Cataloguing-in-Publication Data A catalogue record for this book is available from the British Library First edition published in 1982 by Longman Group UK Limited ROUGH SURFACES, Second Edition Copyright 0 1999 by Imperial College Press All rights reserved. This book, or parts thereof, may not be reproduced in any form or by any means, electronic or mechanical, including photocopying, recording or any information storage and retrieval system now known or to be invented, without written permission from the Publisher. For photocopying of material in this volume, please pay a copying fee through the Copyright Clearance Center, Inc., 222 Rosewood Drive, Danvers, MA 01923, USA. In this case permission to photocopy is not required from the publisher. ISBN 1-86094-100-1 Printed in Singapore by Eurasia Press Pte Ltd For Ann CONTENTS xi PREFACE ... Xlll ACKNOWLEDGEMENTS 1. INTRODUCTION 1.1. Surface Roughness 1.1.1. What Causes Roughness? 1.1.2. Why Is Roughness Important? 1.2. Principles of Roughness Measurement 1.2.1. Range and Resolution 1.3. References 2. STYLUS INSTRUMENTS 2.1. Mechanical Instruments 2.2. Electrical Instruments 2.2.1. Stylus and Skid 2.2.2. Transducers 2.2.3. Pickup 2.2.4. Output Recording 2.3. Sources of Error 2.3. I . Effect of Stylus Size 2.3.2. Effect of Stylus Load 2.3.3. Other Sources of Error 2.4. Calibration and Standards 2.5. References 11 11 13 15 16 18 19 20 20 23 25 28 29 3. 35 36 36 37 44 46 47 49 OPTICAL INSTRUMENTS 3.1. Profiling Techniques 3.1.1. Optical Sections 3.1.2. Optical Probes 3.1.3. Interferometers 3.2. Parametric Techniques 3.2.1. Specular Reflectance 3.2.2. Total Integrated Scatter vii Rough Surfaces viii 3.3. 3.2.3. Angular Distributions 3.2.4. Direct Fourier Transformation 3.2.5. Ellipsorvietry 3.2.6. Speckle References 50 52 52 54 56 4. OTHER MEASUREMENT TECHNIQUES 4.1. Profiling Methods 4.1.1. Taper Sectioning 4.1.2. Electron Microscopy 4.1.3. Capacitance 4.1.4. Scanning Microscopies 4.2. Parametric Methods 4.2.1. Mechanical Methods 4.2.2. Electrical Methods 4.2.3. Fluid Methods 4.2.4. Acoustic Methods 4.3. References 63 63 63 64 66 68 71 71 77 80 83 84 5. 91 91 95 97 100 102 106 OTHER MEASUREMENT TOPICS 5.1. 3D Measurement 5.2. Relocation 5.3. Replication 5.4. In-Process Measurement 5.4.1. Optical Techniques 5.5. References 6. DATA ACQUISITION AND FILTERING 6.1. Data Acquisition 6.2. Filtering 6.2.1. Envelope Filters 6.3. References 113 113 115 125 130 7. AMPLITUDE PARAMETERS 7.1. Extreme-Value Parameters 7.2. Average Parameters 7.3. The Height Distribution 133 134 138 139 Contents 7.4, 7.5, Bearing Area References 8. TEXTURE PARAMETERS 8.1, Random Processes 8.2, The Profile as a Random Process 8.3, Practical Computation 8.4. Fractal Roughness 8.5. Re