Physics And Applications Of Semiconductor Quantum Structures: Proceedings Of The International Workshop On Physics And Applications Of Semiconductor Quantum Structures (asian Science Seminar), Cheju Island, Korea, October 18-23, 1998

Physics and Applications of Semiconductor Quantum Structures Proceedings of the International Workshop on Physics and Applications of Semiconductor Quantum Structures (Asian Science Seminar), Cheju Island, Korea, October 18–23 1998 Edited by Takafumi Yao and Jong-Chun Woo Institute of Physics Publishing Bristol and Philadelphia Copyright © 2001 IOP Publishing Ltd c IOP Publishing Ltd 2001 All rights reserved. No part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, mechanical, photocopying, recording or otherwise, without the prior permission of the publisher. Multiple copying is permitted in accordance with the terms of licences issued by the Copyright Licensing Agency under the terms of its agreement with the Committee of Vice-Chancellors and Principals. British Library Cataloguing-in-Publication Data A catalogue record for this book is available from the British Library. ISBN 0 7503 0637 8 Library of Congress Cataloging-in-Publication Data are available Commissioning Editor: Tom Spicer Production Editor: Simon Laurenson Production Control: Sarah Plenty Cover Design: Victoria Le Billon Marketing Executive: Colin Fenton Published by Institute of Physics Publishing, wholly owned by The Institute of Physics, London Institute of Physics Publishing, Dirac House, Temple Back, Bristol BS1 6BE, UK US Office: Institute of Physics Publishing, The Public Ledger Building, Suite 1035, 150 South Independence Mall West, Philadelphia, PA 19106, USA Typeset in TEX using the IOP Bookmaker Macros Printed in the UK by MPG Books Ltd, Bodmin Copyright © 2001 IOP Publishing Ltd Contents Preface PART 1 Plenary lecture 1 The evolution of semiconductor superlattices and quantum nanostructures L Esaki 1.1 Introduction 1.2 Quantum structures References PART 2 Fabrication and characterization of quantum structures xv 1 3 3 5 9 11 2 Formation and characterization of semiconductor nanostructures J Motohisa and T Fukui 13 2.1 Introduction 14 2.2 InGaAs quantum wires on GaAs multiatomic steps 15 2.2.1 Quantum nanostructures utilizing atomic steps 15 2.2.2 Formation of GaAs multiatomic steps on GaAs (001) vicinal surfaces 17 2.2.3 Fabrication of InGaAs quantum wire structures using multiatomic steps 20 2.2.4 Optical characterization of InGaAs quantum wires 24 2.2.5 InGaAs quantum wire lasers 28 2.3 GaAs and InAs quantum dots and related nanostructures by selective area growth 33 2.3.1 MOVPE selective area growth for quantum nanostructures 33 2.3.2 Selective area MOVPE of GaAs and InAs quantum dots on pyramidal structures 34 Copyright © 2001 IOP Publishing Ltd Contents vi 2.3.3 2.4 Fabrication and characterization of high-density quantum dot arrays and quantum dot network 2.3.4 Position controlled InAs quantum dots on GaAs pyramidal structures 2.3.5 Fabrication of single electron transistors and their transport properties 2.3.6 Resistance-load SET inverter circuit Summary and outlook Acknowledgments References 3 New quantum wire and quantum dot structures by selective MBE on patterned high-index substrates K H Ploo