Micromachining Techniques For Fabrication Of Micro And Nano Structures

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Rijeka: InTech, 2012 - 300 p. – ISBN: 978-953-307-906-6Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.Preface Focused Ion Beam Based Three-Dimensional Nano-Machining Miniature Engineered Tapered Fiber Tip Devices by Focused Ion Beam Micromachining Fundamentals of Laser Ablation of the Materials Used in Microf luiducs Microwave Meta-Material Absorbers Utilizing Laser Micro-Machining Technology Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser Laser Ablation for Polymer Waveguide Fabrication Micro Eletro Discharge Milling for Microfabrication Mechanical Micromachining by Drilling, Milling and Slotting Release Optimization of Suspended Membranes in MEMS Micro Abrasive-Waterjet Technology Electrochemical Spark Micromachining Process Integrated MEMS: Opportunities & Challenges Modeling and Simulation of MEMS Components: Challenges and Possible Solutions

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• Pages In File: 312

• Language: English

• Topic: 220

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• Tags: Машиностроение и материалообработка Электрофизические и электрохимические методы обработки