E-Book Overview
This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.
E-Book Content
Mechanisms and Machine Science 28
Amitabha Ghosh Burkhard Corves
Introduction to Micromechanisms and Microactuators
Mechanisms and Machine Science Volume 28
Series editor Marco Ceccarelli, Cassino, Italy
More information about this series at http://www.springer.com/series/8779
Amitabha Ghosh Burkhard Corves •
Introduction to Micromechanisms and Microactuators
123
Amitabha Ghosh Aerospace Engineering and Applied Mechanics Indian Institute of Engineering Science and Technology, Shibpur Howrah, West Bengal India
Burkhard Corves RWTH Aachen University Aachen Germany
ISSN 2211-0984 ISSN 2211-0992 (electronic) Mechanisms and Machine Science ISBN 978-81-322-2143-2 ISBN 978-81-322-2144-9 (eBook) DOI 10.1007/978-81-322-2144-9 Library of Congress Control Number: 2014958966 Springer New Delhi Heidelberg New York Dordrecht London © Springer India 2015 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. Printed on acid-free paper Springer (India) Pvt. Ltd. is part of Springer Science+Business Media (www.springer.com)
The Alexander von Humboldt Foundation
Preface
Mechanisms have been used since time immemorial for various tasks. Apart from being indispensable for all kinds of mechanization, mechanisms have always fascinated the human mind. Perhaps, in a very rudimentary sense, mechanisms remotely resemble living objects. In the past, mechanism design and inventing new mechanisms were important activities not only for engineers but also for scientists. In fact, the contributions of mathematicians to mechanism theory have really helped this branch of engineering science grow. With the progress in technology, the role of automation and mechanization increased in importance and courses on Theory of Mechanisms and Machines occupied a major share of all Mechanical