Optical Measurement Of Surface Topography

Optical Measurement of Surface Topography Richard Leach (Ed.) Optical Measurement of Surface Topography ABC Editor Prof. Richard Leach National Physical Laboratory (NPL) Industry & Innovation Div. Hampton Road TW11 0LW Teddington, Middlx. United Kingdom E-mail: [email protected] ISBN 978-3-642-12011-4 e-ISBN 978-3-642-12012-1 DOI 10.1007/978-3-642-12012-1 Library of Congress Control Number: 2011924476 c 2011 Springer-Verlag Berlin Heidelberg  This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Typesetting: Data supplied by the authors Cover Design: Scientific Publishing Services Pvt. Ltd., Chennai, India Printed on acid-free paper 987654321 springer.com Preface The measurement and characterisation of areal surface topography is becoming crucial to many modern manufacturing methods. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manufacturing methods requires appropriate measurement strategies. There is also soon to be the introduction of a series of ISO specification standards in this area and this book will become a companion guide to these standards. These new standards are many and complex, as are the new measurement techniques, so industry will hopefully benefit from such a book. There is now a wealth of new optical techniques on the market, or being developed in academia, that can measure areal surface topography. Each method has its strong points and limitations. This book will start with introductory chapters on optical instruments, their common language, generic features and limitations, and their calibration. Each type of modern optical instrument will then be described (in a common format) by experts in the field. Acknowledgements First and foremost I would like to thank all t