The Materials Science Of Thin Films, 2nd Edition

E-Book Overview

This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field.Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added.

E-Book Content

Materials Science of Thin Films Second Edition This page intentionally left blank Materials Science of Thin Films Deposition and Structure Second Edition Milton Ohring Department of Materials Science and Engineering Stevens Institute of Technology Hoboken, New Jersey ACADEMIC PRESS San Diego San Francisco New York Boston London Sydney Tokyo This book is printed on acid-free paper. @ Copyright © 2002 by Academic Press All rights reserved. No part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Requests for permission to make copies of any part of the work should be mailed to the following address: Permissions Department, Harcourt, Inc., 6277 Sea Harbor Drive, Orlando, Florida 32887-6777. Academic Press A division of Harcourt, Inc. 525 B Street, Suite 1900, San Diego, CA 92101-4495, USA http://www.academicpress.com Academic Press Harcourt Place, 32 Jamestown Road, London, NW1 7BY, UK http://www.academicpress.com Library of Congress Catalog Card Number: 2001089414 International Standard Book Number: 0-12-524975-6 Printed in the United States of America 01 02 03 04 05 06 ML 9 8 7 6 5 4 3 2 1 Contents Foreword to First Edition xi Preface xiii Acknowledgments xvii A Historical Perspective xix Chapter 1 A Review of Materials Science 1 1.1. 1.2. 1.3. 1.4. 1.5. 1.6. 1.7. 1.8. 1.9. 1 2 10 14 24 36 44 47 52 52 55 Introduction Structure Defects in Solids Bonds and Bands in Materials Thermodynamics of Materials Kinetics Nucleation An Introduction to Mechanical Behavior Conclusion Exercises References , Chapter 2 Vacuum Science and Technology 2.1. Introduction 2.2. Kinetic Theory of Gases 2.3. Gas Transport and Pumping 57 , 57 58 63 V vi Contents 2.4. Vacuum Pumps 2.5. Vacuum Systems 2.6. Conclusion Exercises References ,, , 70 81 88 90 92 Chapter 3 Thin-Film Evaporation Processes 95 3.1. 3.2. 3.3. 3.4. 3.5. 3.6. 95 97 106 118 128 139 140 143 Introduction The Physics and Chemistry of Evaporation Film Thickness Uniformity and Purity Evaporation Hardware Evaporation Processes and Applications Conclusion Exercises References Chapter 4 Discharges, Plasmas, and Ion-Surface Interactions . . . . 145 4.1. 4.2. 4.3. 4.4. 4.5. 4.6. 4.7. Introduction Plasmas, Discharges, and Arcs Fundamentals of Plasma Physics Reactions in Plasmas Physics of Sputtering Ion Bombardment Modification of Growing Films Conclusion Exercises References 145 147 152 164 170 184 196 198 201 Chapter 5 Plasma and Ion Beam Processing of Thin Films 203 5.1. 5.2