Cathodic Arcs: From Fractal Spots To Energetic Condensation

E-Book Overview

Cathodic Arcs: From Fractal Spots to Energetic Condensation is the first book in over a decade dedicated to the physics and technology of cathodic arcs. It includes a detailed account of arc history, a textbook-like introduction to cathode phenomena, and some basic physics of expanding plasmas; it deals with the infamous macroparticle issue and describes a host of practical plasma filter solutions. In contrast to previous books on cathodic arcs, the focus is on the relation of arc plasmas and their properties to surface modification and thin film deposition. The book contains sections on basic plasma physics and thin film materials science. It also deals with practical issues of coatings such as stress control and the often-underrated issue of the coating’s color. By stressing the fractal nature of cathode spots, the theme of fluctuations can be found throughout the book: fluctuations affect all plasma properties and thereby have consequences for plasma-based surface modifications and film growth. Detailed explanations are complemented by compilations of plasma and materials data arranged in Periodic Tables.

Cathodic Arcs: From Fractal Spots to Energetic Condensation is written with researchers and advanced students in the fields of materials science and plasma physics in mind. It is suitable both as a reference work for the expert as well as an introduction for newcomers to the interdisciplinary fields of plasma-surface interaction and plasma-assisted deposition of thin films.


E-Book Content

Springer Series on atomic, optical, and plasma physics 50 Springer Series on atomic, optical, and plasma physics The Springer Series on Atomic, Optical, and Plasma Physics covers in a comprehensive manner theory and experiment in the entire .eld of atoms and molecules and their interaction with electromagnetic radiation. Books in the series provide a rich source of new ideas and techniques with wide applications in .elds such as chemistry, materials science, astrophysics, surface science, plasma technology, advanced optics, aeronomy, and engineering. Laser physics is a particular connecting theme that has provided much of the continuing impetus for new developments in the f ield. The purpose of the series is to cover the gap between standard undergraduate textbooks and the research literature with emphasis on the fundamental ideas, methods, techniques, and results in the field. 47 Semiclassical Dynamics and Relaxation By: D.S.F. Crothers 48 Theoretical Femtosecond Physics Atoms andMolecules in Strong Laser Fields By F. Großmann 49 Relativistic Collisions of Structured Atomic Particles By A. Voitkiv and J. Ullrich 50 Cathodic Arcs From Fractal Spots to Energetic Condensation By A. Anders 51 Reference Data on Atomic Physics and Atomic Process By B.M. Smirnov Vols. 20–46 of the former Springer Series on Atoms and Plasmas are listed at the end of the book Andre´ Anders Cathodic Arcs From Fractal Spots to Energetic Condensation With 262 Figures and 25 Tables 13 Andre´ Anders Plasma Applications Group Lawrence Berkeley National Laboratory Berkeley, CA USA [email protected] ISSN: 1615-5653 ISBN: 978-0-387-79107-4 e-ISBN: 978-0-387-79108-1 DOI: 10.1007/978-0-387-79108-1 Library of Congress Control Number: 2008929568 # 2008 Springer ScienceþBusiness Media, LLC All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information stor
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