Reflection High-energy Electron Diffraction

REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION Reflection high-energy electron diffraction (RHEED) is the analytical tool of choice for characterizing thin films during growth by molecular beam epitaxy, since it is very sensitive to surface structure and morphology. However, there has been a need for a book which explains how to analyze RHEED patterns. This book serves as an introduction to RHEED for beginners and describes detailed experimental and theoretical treatments for experts. First the principles of electron diffraction and many examples of the interpretation of RHEED patterns are described for beginners. The second part contains detailed descriptions of RHEED theory. The third part applies RHEED to the determination of surface structures, gives detailed descriptions of the effects of disorder and critically reviews the mechanisms contributing to RHEED intensity oscillations. This unified and coherent account will appeal to both graduate students and researchers in the study of molecular beam epitaxial growth. Aya h i k o I c h i m i ya is Professor in the Department of Quantum Engineering, Nagoya University. His specific areas of research interest are reflection high-enery electron diffraction, crystal growth, surface characterization, positron diffraction and scanning tunneling microscopy. P h i l i p I . C o h e n is Professor in the Department of Electrical and Computer Engineering, University of Minnesota. His research interests are mainly in molecular beam epitaxy, electron diffraction, light-assisted film growth and ion-assisted film growth. REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION AYAHIKO ICHIMIYA AND PHILIP I. COHEN published by the press syndicate of the university of cambridge The Pitt Building, Trumpington Street, Cambridge, United Kingdom cambridge university press The Edinburgh Building, Cambridge CB2 2RU, UK 40 West 20th Street, New York, NY 10011–4211, USA 477 Williamstown Road, Port Melbourne, VIC 3207, Australia Ruiz de Alarc´on 13, 28014 Madrid, Spain Dock House, The Waterfront, Cape Town 8001, South Africa http://www.cambridge.org C Cambridge University Press 2004 This book is in copyright. Subject to statutory exception and to the provisions of relevant collective licensing agreements, no reproduction of any part may take place without the written permission of Cambridge University Press. First published 2004 Printed in the United Kingdom at the University Press, Cambridge Typeface Times 10/13 pt. System LATEX 2ε [tb] A catalog record for this book is available from the British Library Library of Congress Cataloging in Publication data Ichimiya, Ayahiko, 1940– Reflection high-energy electron diffraction/Ayahiko Ichimiya and Philip I. Cohen. p. cm. Includes bibliographical references and index. ISBN 0 521 45373 9 1. Reflection high energy electron diffraction. 2. Thin films – Surfaces – Analysis. I. Cohen, Philip I. II. Title. QC176.84.S93124 2004 2004045180 530.4 275 – dc22 ISBN 0 521 45373 9 hardback The publisher has used its best endeavors to ensure that the URLs for external websites referred to in this book are correct and active at the time of going to press. However, the publisher has no responsibility for the websites and can make no guarantee that a site will remain live or that the content is or will re