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This book provides an in-depth description of x-ray microanalysis in the electron microscope. It is sufficiently detailed to ensure that novices will understand the nuances of high-quality EDX analysis. Includes information about hardware design as well as the physics of x-ray generation, absorption and detection, and most post-detection data processing. Details on electron optics and electron probe formation allow the novice to make sensible adjustments to the electron microscope in order to set up a system which optimises analysis. It also helps the reader determine which microanalytical method is more suitable for their planned application.
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MICROSCOPY HANDBOOKS 49 Energy-Dispersive X-Ray Analysis in the Electron Microscope Royal Microscopical Society MICROSCOPY HANDBOOKS Series Editor Mark Rainforth (Materials Sciences), Department of Engineering Materials, University of Sheffield, Sheffield S1 3JD, UK 08 Maintaining and Monitoring the Transmission Electron Microscope 09 Qualitative Polarized Light Microscopy 20 The Operation of Transmission and Scanning Electron Microscopes 21 Cryopreparation of Thin Biological Specimens for Electron Microscopy 25 The Role of Microscopy in Semiconductor Failure Analysis 26 Enzyme Histochemistry 30 Food Microscopy: a Manual of Practical Methods, Using Optical Microscopy 31 Scientific PhotoMACROgraphy 32 Microscopy of Textile Fibres 33 Modern PhotoMICROgraphy 34 Contrast Techniques in Light Microscopy 35 Negative Staining and Cryoelectron Microscopy: the Thin Film Techniques 36 Lectin Histochemistry 37 Introduction to Immunocytochemistry (2nd Edn) 38 Confocal Laser Scanning Microscopy 39 Introduction to Scanning Transmission Electron Microscopy 40 Fluorescence Microscopy (2nd Edn) 41 Unbiased Stereology: Three-Dimensional Measurement in Microscopy 42 Introduction to Light Microscopy 43 Electron Microscopy in Microbiology 44 Flow Cytometry (2nd Edn) 45 Immunoenzyme Multiple Staining Methods 46 Image Cytometry 47 Electron Diffraction in the Transmission Electron Microscope 48 Electron Energy Loss Spectroscopy 49 Energy-Dispersive X-Ray Analysis in the Electron Microscope Energy-Dispersive X-Ray Analysis in the Electron Microscope A.J.Garratt-Reed Center for Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA and D.C.Bell Center for Imaging and Mesoscale Structures, Harvard University, Cambridge, Massachusetts, USA © BIOS Scientific Publishers Limited, 2003 First published 2003 This edition published in the Taylor & Francis e-Library, 2005. “To purchase your own copy of this or any of Taylor & Francis or Routledge’s collection of thousands of eBooks please go to http://www.ebookstore.tandf.co.uk/.” All rights reserved. No part of this book may be reproduced or transmitted, in any form or by any means, without permission. A CIP catalogue record for this book is available from the British Library. ISBN 0-203-53754-8 Master e-book ISBN ISBN 0-203-59731-1 (Adobe e-Reader Format) ISBN 1 85996 109 6 (Print Edition) BIOS Scientific Publishers Ltd 9 Newtec Place, Magdalen Road, Oxford OX4 1RE, UK Tel. +44 (0)1865 726286. Fax +44 (0)1865 246823 World Wide Web home page: http://www.bios.co.uk/ Distributed exclusively in the United States, its dependent territories, Canada, Mexico, Central and South America, and the Caribbean by Springer-Verlag New York Inc., 175 Fifth Avenue, New York, USA, by arrangement with BIOS Scientific Publishers Ltd., 9 Newtec Place, Magdalen Road, Oxford, OX4 1RE, UK Production Editor: Eleanor Hooker Contents Abbreviations viii Preface x 1. History 1 2. Principles 5 3. The energy-dispersive X-ray detector 19 4. Spectral processing 46