<STRONG>Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.
microtechnology and mems microtechnology and mems Series Editor: H. Fujita D. Liepmann The series Microtechnology and MEMS comprises text books, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students. Mechanical Microsensors By M. Elwenspoek and R. Wiegerink CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications By D. Lange, O. Brand, and H. Baltes Micromachines as Tools for Nanotechnology Editor: H. Fujita Modelling of Microfabrication Systems By R. Nassar and W. Dai Laser Diode Microsystems By H. Zappe Silicon Microchannel Heat Sinks Theories and Phenomena By L. Zhang, K.E. Goodson, and T.W. Kenny Shape Memory Microactuators By M. Kohl Force Sensors for Microelectronic Packaging Applications By J. Schwizer, M. Mayer and O. Brand Integrated Chemical Microsensor Systems in CMOS Technology By A. Hierlemann CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms By F.M. Li and A. Nathan Micromechanical Photonics By H. Ukita Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models By T. Bechtold, E.B. Rudnyi, and J.G. Korvink T. Bechtold E.B. Rudnyi J.G. Korvink Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models With 108 Figures, 8 in Color and 9 Tables 123 Dr. Tamara Bechtold Dr. Evgenii B. Rudnyi Professor Dr. Jan G. Korvink Universit¨at Freiburg Institut f¨ur Mikrosystemtechnik Georges-K¨ohler-Allee 103 79110 Freiburg, Germany E-mail:
[email protected] [email protected] [email protected] Series Editors: Professor Dr. Hiroyuki Fujita University of Tokyo, Institute of Industrial Science 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan Professor Dr. Dorian Liepmann University of California, Department of Bioengineering 6117 Echteverry Hall, Berkeley, CA 94720-1740, USA ISSN 1615-8326 ISBN-10 3-540-34612-0 Springer Berlin Heidelberg New York ISBN-13 978-3-540-34612-8 Springer Berlin Heidelberg New York Library of Congress Control Number: 2006930117 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specif ically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microf ilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright